High precision transfer printing for hybrid integration of multi-material waveguide devices

Research output: Research - peer-reviewPaper

We present a transfer printing technique with sub-100nm absolute placement accuracy. Hybrid integration of pre-processed membrane waveguide devices is achieved across a range of materials, including silicon, polymer and III-V devices.
Original languageEnglish
Number of pages2
StatePublished - 5 Jul 2018
EventAdvanced Photonics Congress - Integrated Photonics Research, Silicon, and Nano-Photonics 2018 - Zurich, Switzerland
Duration: 2 Jul 20185 Jul 2018
https://www.osa.org/en-us/meetings/osa_meetings/advanced_photonics_congress/program/integrated_photonics_research_silicon_and_nano-p/

Conference

ConferenceAdvanced Photonics Congress - Integrated Photonics Research, Silicon, and Nano-Photonics 2018
Abbreviated titleIPR 2018
CountrySwitzerland
CityZurich
Period2/07/185/07/18
Internet address

    Research areas

  • transfer printing technique, silicon, polymer, III-V-on-silicon

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