The data provided here in support for the paper: ''Sub-micron-accuracy automated position and rotation registrat.ion method for transferred devices''. The data attached is the following: QVGA.jpg : Quarter video graphic array (QVGA) micro-LED device (320x240 elements). This image was used for the analysis of the lithographically patterned devices. Printed_micro-LED_devices.jpg: Full array of micro-LED devices printed to a silica substrate coated with a fully-cured thin layer of optical polymer (Norland NOA 65). QVGA_pitch_values.mat: distances between the centers of consecutively pixels in the QVGA device (figure 4) QVGA_centers_position.mat: the position of the center of each pixel in the image (figure 4) correlation_multipleAngles.mat: The matrix used to create figure 3 representing the correlation for multiple angles centers_x.mat: the x coordinates of the centers of figure 6 centers_y.mat: the y coordinates of the centers of figure 6 pitchValues_x.mat: distances between the centers of the consecutively pixels of figure 6 in the x direction pitchValues_y.mat: distances between the centers of the consecutively pixels of figure 6 in the y direction -------------------------------------------- For further information, please contact: Eleni Margariti-eleni.margariti@strath.ac.uk Michael Strain-michael.strain@strath.ac.uk