The dataset contains raw and processed data files.

Raw files are in the .zip file format and include
- Microscope images for estimating in-plane displacement of tuning actuators (including a USAF resolution target reference image for size calibration).
- Vibrometer voltage measurements for frequency response curves with and without on-chip tuning

Processed files are in .csv file format and include
- Frequency response data with and without tuning
- Tuning response data
- In-plane lateral displacement data
- Optical angle vs voltage data
- Mirror surface curvature data
- Device temperature profile data
- Device frequency variation data

Detailed description and creation of the figures present in the associated manuscript are in the .ipynb (Jupyter notebook) file.